Eur. Phys. J. AP 5, 143-148 (1999)
https://doi.org/10.1051/epjap:1999122

Backscattering of electrons from selected oxides: MgO, SiO₂, and Al₂O₃

¹ Advanced Materials Division, ITC and INFM, 38050 Povo, Trento, Italy
² INFM and Physics Department, Trento University, 38050 Povo, Trento, Italy

Received: 7 August 1998
Revised: 5 November 1998
Accepted: 19 November 1998
Published online: 15 February 1999

Abstract

The inelastic and elastic cross-sections of an interacting electron beam with MgO, SiO₂, and Al₂O₃ have been calculated and tabulations are provided for primary electron energies lower than 10 keV. By using the tabulated cross-sections, a Monte-Carlo simulation is utilized to obtain the backscattering coefficient in the energy range 1–10 keV