https://doi.org/10.1051/epjap:2000125
An experimental method for measuring the Poisson's ratio in thin films and multilayers using a tensile machine set up on an X-ray goniometer
Laboratoire de Métallurgie Physique (UMR 6630 CNRS),
Université de Poitiers - SP2MI, Téléport 2,
bd Marie et Pierre Curie, BP 30179, 86962 Futuroscope Chasseneuil Cedex, France
Corresponding author: renault@lmp.univ-poitiers.fr
Received:
25
August
1999
Revised:
9
December
1999
Accepted:
10
January
2000
Published online: 15 May 2000
A few years ago, some authors have observed by X-ray diffraction
analysis in metallic multilayers with small period an in plane
expansion combined with a large perpendicular expansion. These
trends differ from prediction based on simple continuum elasticity
theory. This unexpected result has been the starting point of an
experimental development in our laboratory for determining the
Poisson's ratio in such systems. Applying the 
method
on film-substrate set which is elastically deformed in an X-ray
diffractometer, it is possible to extract the Poisson's ratio of
the film. In this paper, we first detail the theoretical principles
of the method and, we show its application on 150 nm thick tungsten
films elaborated by ion beam assisted deposition on duralumin
substrates. The obtained results demonstrate the feasibility of
the method and its good precision.
PACS: 68.60.-p – Physical properties of thin films, nonelectronic / 62.20.Dc – Elasticity, elastic constants / 61.10.-i – X-ray diffraction and scattering
© EDP Sciences, 2000
