https://doi.org/10.1051/epjap:2000168
Deformations induced by a Vickers indentor in InP at room temperature
1
Université de Poitiers, Laboratoire de Métallurgie Physique (UMR 6630 CNRS), SP2MI,
Téléport 2, boulevard Marie et Pierre Curie, BP 30179, 86962 Futuroscope-Chasseneuil Cedex, France
2
France Telecom (URA 250 CNRS), 196 avenue Henri Ravéra, Laboratoire Concepts des
Dispositifs pour la Photonique, BP 107, 92225 Bagneux Cedex, France
Received:
2
May
2000
Revised:
17
July
2000
Accepted:
4
September
2000
Published online: 15 October 2000
(001) surfaces of indium phosphide (InP) single crystals have been deformed at room temperature by a Vickers indenter. The indents formed were observed by transmission electron microscopy (TEM) in plan views as well as in cross-sectional views obtained by focused-ion beam (FIB) milling. The in-depth structure of the plastic zone has been investigated as well as the dislocation arrangements. The polarity of the crystal was determined by convergent beam electron diffraction (CBED) and the plastic anisotropy was discussed.
PACS: 61.72.Ff – Direct observation of dislocations and other defects (etch pits, decoration, electron microscopy, x-ray topography, etc.) / 62.20.Fe – Deformation and plasticity (including yield, ductility, and superplasticity)
© EDP Sciences, 2000
