https://doi.org/10.1051/epjap:2001151
Realization and thermal characterization of thin-film optothermal microsensor
1
LEES-IGE, 2 avenue Jean Moulin,
90000 Belfort, France
2
CREST-IGE, 2 avenue Jean Moulin,
90000 Belfort, France
Corresponding author: gualous@ige.univ-fcomte.fr
Received:
4
December
2000
Revised:
8
March
2001
Accepted:
9
March
2001
Published online: 15 May 2001
The aim of this investigation is to study thin-film thermoelectric linear arrays for high spatial temperature measurements and to analyze power laser energy profile. The sensitive area consists of a planar of 16 individual thin-film Au-Pd thermocouple junctions with 8 μm × 8 μm of surface area. This sensor allows 16 temperature measurements per 288 μm. It is processed by means of standard integrated circuit techniques. Thermal simulation of heat conduction in gold and palladium layers has been carried out. The sensor thermoelectric response has been characterized in transient regime and steady state. The time constant of thermocouple response is of the order of 140 μs. A linear relationship between the thermoelectric voltage and the incident power laser has been put in evidence. Using the linear array, a Gaussian profile of the incident laser beam is obtained.
PACS: 41.85.Ew – Beam profile, beam intensity / 78.20.Nv – Thermooptical and photothermal effects / 78.20.Ci – Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity)
© EDP Sciences, 2001
