https://doi.org/10.1051/epjap:2001164
Sublimation and deposition behaviour of palladium (II) acetylacetonate
Department of Chemical Engineering, University College London,
Torrington Place, London, WC1E 7JE, UK
Corresponding author: a.gavriilidis@ucl.ac.uk
Received:
23
May
2000
Revised:
2
March
2001
Accepted:
27
March
2001
Published online: 15 July 2001
Sublimation and deposition of the metal-organic complex palladium (II) acetylacetonate
[ Pd(acac)2] was investigated through thermogravimetry and XRD. The temperature range for
sublimation, avoiding thermal decomposition, was determined to be 100−160 °C and required to
take place in the presence of an inert gas such as helium. The complex was found to be highly
unstable in the presence of hydrogen. The Clausius-Clapeyron equation determined is
. Deposition of the complex on monolithic substrates required the presence
of adsorption sites. For the system investigated, change of the apparent deposition activation
energy was found to take place within the range 100−150 °C. To obtain Pd metal particles, the
precursor was reduced in hydrogen at a subsequent stage and temperatures close to room
temperature were found to be sufficient.
PACS: 82.20.Pm – Rate constants, reaction cross sections, and activation energies / 81.15.Gh – Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, etc.)
© EDP Sciences, 2001
