https://doi.org/10.1051/epjap:2002067
Study of the dc and 100 kHz glow discharges in acetylene-nitrogen mixture by means of optical emission spectroscopy
Institute of Inorganic Chemistry and Metallurgy of Rare Elements,
Chemistry Department, Wroclaw University of Technology
Wyb. Wyspianskiego 27, 50-370 Wroclaw, Poland
Corresponding author: zyrnicki@ichn.ch.pwr.wroc.pl
Received:
12
April
2001
Revised:
19
April
2002
Accepted:
11
June
2002
Published online:
12
September
2002
The dc and 100 kHz low pressure discharges in acetylene-nitrogen mixture have been
studied here. Optical emission spectroscopy was used for identification of active plasma
components and to determine plasma temperature. Relative concentrations of H, CH and CN
were investigated versus experimental conditions by optical actinometry techniques. Emission
intensities of N2 and N normalized to intensity of argon line were also monitored as a function
of experimental parameters. The rotational temperatures from the N
B
-X
(0-0) and
CN B2Σ+-X2Σ+ (0-0) bands and vibrational temperatures from the CN
(B2Σ+-X2Σ+) and N2 (C
-B
) spectra were
determined. Plasma processes and plasma equilibrium state were discussed.
PACS: 52.70.-m – Plasma diagnostic techniques and instrumentation / 52.80.-s – Electric discharges / 52.20.-j – Elementary processes in plasmas
© EDP Sciences, 2002