Eur. Phys. J. AP 19, 181-183 (2002)
https://doi.org/10.1051/epjap:2002064

Dielectric properties of (Ba_0.67Sr_0.33)TiO₃ thin film for uncooled infrared focal plane arrays

Department of Electronics Science and Technology, Huazhong University of Science and Technology, Wuhan 430074, P.R. China

Corresponding author: Liu_Shijian@163.com

Received: 9 November 2001
Revised: 25 April 2002
Accepted: 27 June 2002
Published online: 12 September 2002

Abstract

The (Ba_0.67Sr_0.33)TiO₃ thin film for dielectric bolometer mode of uncooled infrared focal plane arrays prepared on Pt/Ti/SiO₂/Si by radio-frequency magnetron sputtering has been investigated focusing on the dielectric properties. X-ray diffractometer shows the BST films to be well perovskite structure. These films exhibit good surface morphology. The dielectric properties of the BST thin films have been measured as a function of temperature using a HP4284A LCR meter. According to the dielectric constant-temperature curve, the Curie temperature of the BST thin film is about 30 °C, around room temperature. The maximum change in the dielectric constant is as large as 78/k, and more than 21% relative change in the dielectric constant has been obtained.