Eur. Phys. J. AP 23, 89-93 (2003)
https://doi.org/10.1051/epjap:2003039

Pulsed laser deposition of barium metaplumbate thin films for ferroelectric capacitors

¹ INESC-Porto, Unidade de Optoelectrónica e Sistemas Electrónicos, 4169-007 Porto, Portugal
² Universidade de Trás-os-Montes e Alto Douro, Departamento de Física, 5001-911 Vila Real, Portugal
³ Universidade de Aveiro, Departamento de Engenharia Cerâmica e do Vidro, 3810-193, Aveiro, Portugal

Corresponding author: andrei@hobbit.fc.up.pt

Received: 21 November 2002
Revised: 5 March 2003
Accepted: 8 April 2003
Published online: 12 June 2003

Abstract

Barium metaplumbate thin films were deposited in situ by pulsed laser deposition on Si/SiO₂/Ti/Pt substrates with a high deposition rate. The temperatures used ranged between 400 °C and 700 °C. As the deposition temperature was increased, the films assumed a strong (222) preferential orientation. This orientation of the electrodes was reflected on the PZT films, having a very big influence on their ferroelectric behavior. The PZT films made over BPO deposited at high temperature presented high values of remanent polarization (43 μC/cm²) but indications of high leakage currents could be observed in the hysteresis loops. By using BPO bottom electrodes, a 30% improvement in the fatigue behavior of PZT capacitors when compared with the normal platinum electrodes was observed.