https://doi.org/10.1051/epjap:2003085
A mason type analysis of cylindrical ultrasonic micromotors
Laboratoire d'Électrotechnique et d'Électronique Industrielle, Groupe
“Machines et Mécanismes Électroactifs – EM”, LEEI,
INPT-ENSEEIHT, 31000 Toulouse, France
Corresponding author: Bertrand.Nogarede@leei.enseeiht.fr
Received:
4
November
2002
Revised:
19
March
2003
Accepted:
17
June
2003
Published online:
2
December
2003
This article deals with the analytical modelling of piezoelectric cylindrical micromotors [Morita et al., Jpn J. Appl. Phys. 35, 3251 (1996) and IEEE Trans. Ultrason. Ferroelectr. and Frequency Control 45, 1178 (1998)] and supplements the kinematics analysis of Pin Lu et al. [Sens. and Actuators A 87, 194 (2001)]. The modelling, based on an equivalent electric circuit, is established using geometrical and electromechanical parameters for the different parts of the motor. It gives electromechanical characteristics and other useful values for motor design.
PACS: 43.38.Fx – Piezoelectric and ferroelectric transducers / 43.40.Cw – Vibrations of strings, rods, and beams / 77.65.-j – Piezoelectricity and electromechanical effects
© EDP Sciences, 2004
