Eur. Phys. J. Appl. Phys. 37, 335-341 (2007)
https://doi.org/10.1051/epjap:2007036

Monte Carlo simulation of electron swarm parameters in O₂

Electrotechnic Department, University of Sciences and Technology, PO Box 1505 El-M'naouar, 31000 Oran, Algeria

Corresponding author: settaouti@yahoo.fr

Received: 27 September 2005
Accepted: 13 December 2006
Published online: 14 February 2007

Abstract

Oxygen plasmas have found numerous applications in plasma processing, such as reactive sputtering, dry etching of polymers, oxidation, and resist removal of semiconductors. Swarm and transport coefficients are essential for better understanding and modelling of these gas discharge processes. The electron swarms in a gas under the influence of an electric field can be simulated with the help of a Monte Carlo method. The swarm parameters evaluated are compared with experimental results.