https://doi.org/10.1051/epjap:2008022
Microwave plasmas at atmospheric pressure: theoretical insight and applications in surface treatment
Laboratoire de Science et Génie des Surfaces, Nancy-Université,
CNRS, Parc de Saurupt, CS 14234, 54042 Nancy Cedex, France
Corresponding author: thierry.belmonte@mines.inpl-nancy.fr
Received:
5
July
2007
Revised:
29
August
2007
Accepted:
15
January
2008
Published online:
19
March
2008
This work is an assessment of recent developments on microwave plasmas at atmospheric pressure and their applications in the field of surface treatment. A special attention is paid to the question of the accuracy of data at high temperature (above 2000 K) and to the non-locality of the energy dissipation in argon and helium plasmas.
PACS: 34.50.Dy – Interactions of atoms and molecules with surfaces; photon and electron emission; neutralization of ions
© EDP Sciences, 2008
