Eur. Phys. J. Appl. Phys. 42, 327-337 (2008)
https://doi.org/10.1051/epjap:2008074

Resonance phenomena in microwave nonmagnetized plasma source. Plasmachemical application

¹ Prokhorov General Physics Institute of RAS, Moscow, Russia
² Samsung Electronics Co., LTD, Korea

Corresponding author: kossyi@fpL.gpi.ru

Received: 20 December 2006
Revised: 27 September 2007
Accepted: 12 February 2008
Published online: 30 April 2008

Abstract

Scheme of coaxial microwave gas-discharge plasma source based on a “plasma resonance” phenomenon is presented. Possibility of conditions realization at which energy of accelerated in the “resonance” electrons goes into ionization processes (in volume of chamber outside of “resonance” region) is discussed. Results of experimental investigation of a coaxial microwave plasmatron in which “resonance” mechanisms have been manifested are presented. A plasmachemical reactor based on a “resonance” plasmatron is described. The data on plasmachemical decomposition of CF₂Cl₂ are displayed.