https://doi.org/10.1051/epjap:2008198
Diagnostic of 13.56 MHz RF sustained Ar–N2 plasma by optical emission spectroscopy
1
Department of Physics, Gomal University, D.I. Khan, Pakistan
2
Department of Physics, Quaid-i-Azam University, 45320 Islamabad, Pakistan
3
Department of Physics, Peshawar University, Peshawar, Pakistan
4
National Tokamak Fusion Program, 3329 Islamabad, Pakistan
Corresponding author: mzakaullah@qau.edu.pk
Received:
8
January
2008
Revised:
10
July
2008
Accepted:
1
November
2008
Published online:
14
January
2009
Optical Emission Spectroscopy (OES) is used to investigate the effect of argon gas mixing on the electron temperature, the degree of nitrogen dissociation and the active species concentration in a 13.56 MHz radio frequency (RF) sustained nitrogen plasma. The electron
temperature is determined from Ar-I emission line intensities by using the
modified Boltzmann's plot method and is found to be increased with argon
mixing in nitrogen plasma. The concentration of active species and
is monitored in terms of the emission intensities of nitrogen (0–0) bands of the second positive and the first negative systems respectively. The concentration of
active species along with the degree of N2-dissociation is appreciably
enhanced by argon mixing signifying the role of argon metastables in the
excitation and dissociation processes.
PACS: 52.80.Pi – High-frequency and RF discharges / 52.70.Kz – Optical (ultraviolet, visible, infrared) measurements / 81.65.Lp – Surface hardening: nitridation, carburization, carbonitridation / 51.50.+v – Electrical properties
© EDP Sciences, 2009