https://doi.org/10.1051/epjap/2011110013
Dynamic study of a field emission sensor based on carbon nanotubes for acceleration and high frequency vibration sensing
Nano-Physics Research Laboratory, Department of Physics, University of Tehran, Tehran, Iran
a
e-mail: arzi@khayam.ut.ac.ir
Received:
10
January
2011
Accepted:
16
May
2011
Published online:
21
July
2011
Plasma enhanced chemical vapor deposition was used to grow vertically aligned carbon nanotubes (CNTs) on silicon substrate. Field emission from these nanotubes was realized and used to fabricate a field emission-based sensor. Titanium dioxide was used as spacing layer between the emitters and a flexible anode made of silicon membrane. The variation of the emission current during mechanical vibration of the silicon membrane was measured and compared with a theoretical prediction. Experimental results show that field emission from CNTs is a good candidate for high frequency vibration sensing, measurement of resonance frequency, fabrication of accelerometer and other types of mechanical sensors. The fabricated device, due to a low distance between its electron emitters and the anode, works at low voltages with high emission current.
© EDP Sciences, 2011
