Eur. Phys. J. Appl. Phys. (2012) 58: 30802
https://doi.org/10.1051/epjap/2012120013

Examination of an ICP magnesium plasma by spectroscopy and double Langmuir probe measurements

PlasmAIX for Plasma Research, Heimerik 47, 2440 Geel, Belgium

^a e-mail: Karel.burm@gmx.net

Received: 9 January 2012
Revised: 27 February 2012
Accepted: 24 May 2012
Published online: 5 July 2012

Abstract

Optical emission spectroscopy and double Langmuir probe measurements are performed on a magnesium plasma from an inductively coupled plasma source. These measurements are performed in order to examine their feasibility to characterize the plasma, its degree of ionization and its deviation from thermal equilibrium.