The waveguide method for measuring parameters of the surface layers
Department of Radiophysics, People’s Friendship University of Russia, 6 Miklukho-Maklaya str., 117198 Moscow, Russia
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A new method has been applied for determining the mean square deviation of surface roughness and the imaginary part of permittivity of the material near-surface region. The method is based on the scattering and absorption of light in waveguide systems of integrated optics. It has high sensitivity and ease of implementation. The advantages of the proposed method are confirmed experimentally.
© EDP Sciences, 2012