Eur. Phys. J. Appl. Phys. (2015) 69: 10801
https://doi.org/10.1051/epjap/2014140246

The role of Ar flow rates on synthesis of nanostructured zirconium nitride layer growth using plasma enhanced hot filament nitriding (PEHFN) technique

¹ Department of Physics, Government College University, Lahore 54000, Pakistan
² Plasma Physics Laboratory, University of Saskatchewan, Saskatoon, SK S7N 5E2, Canada
³ Centre for Advanced Studies in Physics (CASP), Government College University, Lahore 54000, Pakistan
⁴ Institute of Environmental Engineering and Research, University of Engineering and Technology, Lahore 54000, Pakistan
⁵ Saskatchewan Structural Sciences Centre, University of Saskatchewan, 110 Science Place, Saskatoon, SK S7N 5C9, Canada
⁶ Department of Engineering Physics, University of Saskatchewan, Saskatoon, SK S7N 5A9, Canada

^a e-mail: ahriaz@hotmail.com

Received: 16 March 2014
Accepted: 17 June 2014
Published online: 7 January 2015

Abstract

The effects of nonreactive sputter gas (argon) flow rates on the surface properties of zirconium are investigated in argon-nitrogen admixture (60 sccm) using dc plasma enhanced hot filament nitriding (PEHFN) technique. The nitrided specimens are analyzed using X-ray diffractometry (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM) and nano hardness tester to study their surface properties. Phase analysis (XRD) confirms the development of o-Zr₃N₄ phase for all exposure conditions. Crystallite size analysis using XRD and AFM morphology confirms the growth of nanostructured zirconium nitride layers. Considerable enhancement in hardness is found when the sample is treated for 40 sccm argon in the admixture Ar:N₂ (60 sccm).