( 1 0 1 ¯ 1 $ \begin{array}{ccc}1& 0& \begin{array}{cc}\bar{1}& 1\end{array}\end{array}$ ) preferential orientation of polycrystalline AlN grown on SiO2/Si wafers by reactive sputter magnetron technique

Juan Bürgi; Javier García Molleja; Raúl Bolmaro; Mattia Piccoli; Edoardo Bemporad; Aldo Craievich; Jorge Feugeas

doi:10.1051/epjap/2016150446

EPJ

( $\begin{array}{ccc}1& 0& \begin{array}{cc}\bar{1}& 1\end{array}\end{array}$ ) preferential orientation of polycrystalline AlN grown on SiO₂/Si wafers by reactive sputter magnetron technique

Juan Bürgi¹, Javier García Molleja¹^,2^a, Raúl Bolmaro¹, Mattia Piccoli³, Edoardo Bemporad³, Aldo Craievich⁴ and Jorge Feugeas¹

¹ Instituto de Física Rosario (CONICET-UNR), 27 de Febrero 210 bis, S2000EZP Rosario, Argentina
² School of Physics, Yachay Tech, Yachay City of Knowledge, 100119 Urcuquí, Ecuador
³ Department of Engineering, University of Rome “Roma Tre”, Via della Vasca Navale 79, 00146 Rome, Italy
⁴ Instituto de Física (Universidade de São Paulo), Rua do Matão Travessa R 187, CEP05508-090 São Paulo, Brazil

Received: 28 August 2015
Revised: 13 January 2016
Accepted: 18 February 2016
Published online: 1 April 2016

Abstract

Aluminum nitride (AlN) is a ceramic compound that could be used as a processing material for semiconductor industry. However, the AlN crystalline structure plays a crucial role in its performance. In this paper, polycrystalline AlN films have been grown onto Si(1 1 1) and Si(1 0 0) (with an oxide native coverage of SiO₂) wafers by RSM (reactive sputter magnetron) technique using a small (5 L) reactor. The development of polycrystalline AlN films with a good texture along ( $\begin{array}{ccc}1& 0& \begin{array}{cc}\bar{1}& 1\end{array}\end{array}$ ) planes, i.e., semi-polar structure, was shown. Analyses were done using X-ray diffraction in the Bragg-Brentano mode and in the GIXRD (grazing incidence X-ray diffraction) one, and the texture was determined through pole figures. The structure and composition of these films were also studied by TEM and EDS techniques. Nevertheless, the mapping of the magnetic field between the magnetron and the substrate has shown a lack of symmetry at the region near the substrate. This lack of symmetry can be attributable to the small dimensions of the chamber, and the present paper suggests that this phenomenon is the responsible for the unusual ( $\begin{array}{ccc}1& 0& \begin{array}{cc}\bar{1}& 1\end{array}\end{array}$ ) texture developed.

15th European Conference on Atoms Molecules and Photons (ECAMP)
June 30 to July 4, 2025
Innsbruck, Austria

EPJ

() preferential orientation of polycrystalline AlN grown on SiO2/Si wafers by reactive sputter magnetron technique

Conference announcements

( $\begin{array}{ccc}1& 0& \begin{array}{cc}\bar{1}& 1\end{array}\end{array}$ ) preferential orientation of polycrystalline AlN grown on SiO₂/Si wafers by reactive sputter magnetron technique