Eur. Phys. J. Appl. Phys. 89, 20401 (2020)
https://doi.org/10.1051/epjap/2020190263

Regular Article

Synthesis and surface modification of light emitting silicon nanoparticles using non-thermal plasma techniques^★

Institute of Physics of the Czech Academy of Sciences, Cukrovarnická 10, 16200 Praha, Czech Republic

^* e-mail: mullerm@fzu.cz

Received: 2 September 2019
Received in final form: 31 January 2020
Accepted: 18 February 2020
Published online: 15 April 2020

Abstract

We have synthesised silicon nanoparticles (Si-NPs) with photoluminescence ranging from blue to IR spectral region using a low-pressure RF plasma in a flow-through glass tube reactor. The spectral position of photoluminescence band of Si-NPs is controlled by the synthesis parameters such as plasma power, silane and hydrogen concentration and pressure in the working area. Modification of Si-NPs surface both on air after the synthesis and in the vacuum chamber by second plasma in methylsilane atmosphere causes a blue spectral shift of the photoluminescence band.