https://doi.org/10.1051/epjap:2004036
Density of oxygen atoms in high pressure (10–50 torr) flowing microwave post-discharges for elastomer treatments
1
SME, Centre de recherches du Bouchet, rue Lavoisier, 91710 Vert Le
Petit, France
2
CPAT – UPS, 118 route de Narbonne, 31062 Toulouse Cedex, France
Corresponding author: h.blanchard@snpe.com
Received:
30
October
2003
Revised:
15
March
2004
Accepted:
30
March
2004
Published online:
11
May
2004
Results are presented on the production of oxygen atoms in flowing microwave post-discharges in a reactor of 5 litres at high pressures (10-50 torr). Diagnostics of O-atom densities are obtained by NO titration in the post-discharge. An hydrodynamic and kinetic model has been developed to obtain the spatial distribution of O-atoms inside the post-discharge reactor. Such post-discharge processes at high pressures are of interest for elastomer treatments.
PACS: 52.80.-s – Electric discharges / 52.70.Kz – Optical (ultraviolet, visible, infrared) measurements / 52.77.Bn – Etching and cleaning
© EDP Sciences, 2004
