Eur. Phys. J. Appl. Phys. 27, 59-65 (2004)
https://doi.org/10.1051/epjap:2004073

From photon emission microscopy to Raman spectroscopy: Failure analysis in microelectronics

¹ IMEC, Kapeldreef 75, B-3001, Leuven, Belgium
² Now at Lucent Technologies, Bell Laboratories, Murray Hill, NJ, USA

Corresponding author: dewolfi@imec.be

Received: 9 July 2003
Accepted: 18 December 2003
Published online: 15 July 2004

Abstract

This paper discusses two techniques that have, at first sight, completely different applications: photon emission microscopy (PEM) and micro-Raman spectroscopy (μRS). We explain the principles of these techniques, their application domain, and we will show that they can in some cases offer complementary information, and be applied to common or similar problems.