https://doi.org/10.1051/epjap/2012120349
Swift heavy ion-induced silicon dioxide nanostructuration: experimental observation of velocity effect
1
Université Montpellier 2, IES, UMR5214, F-34095 Montpellier Cedex 5, France
2
CNES, 31410 Toulouse, France
a e-mail: antoine.touboul@univ-montp2.fr
Received:
31
August
2012
Revised:
21
September
2012
Accepted:
2
October
2012
Published online:
5
November
2012
Thanks to atomic force microscope observation of swift heavy ion-induced structural modifications of SiO2-Si layer, we show that for a given linear energy transfer value the radial atomic modification along the ion track depends on the ion velocity regime.
© EDP Sciences, 2012