https://doi.org/10.1051/epjap/2013120483
Scaling prospects in mechanical energy harvesting with piezo nanowires*
IMEP-LAHC, Joint Research Unit, CNRS/Grenoble-INP/Université Joseph Fourier/Université de Savoie Grenoble-INP/Minatec, 3 parvis Louis Néel, Grenoble, France
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Received:
22
October
2012
Accepted:
9
April
2013
Published online:
5
July
2013
Abstract
The combination of 3D processing technologies, low power circuits and new materials integration makes it conceivable to build autonomous integrated systems, which would harvest their energy from the environment. In this paper, we focus on mechanical energy harvesting and discuss its scaling prospects toward the use of piezoelectric nanostructures, able to be integrated in a CMOS environment. It is shown that direct scaling of present MEMS-based methodologies would be beneficial for high-frequency applications only. For the range of applications which is presently foreseen, a different approach is needed, based on energy harvesting from direct real-time deformation instead of energy harvesting from vibration modes at or close to resonance. We discuss the prospects of such an approach based on simple scaling rules
Contribution to the Topical Issue “International Semiconductor Conference Dresden-Grenoble – ISCDG 2012”, Edited by Gérard Ghibaudo, Francis Balestra and Simon Deleonibus.
© EDP Sciences, 2013
